发明名称 Method for etching electronic components containing tantalum
摘要 The present invention provides methods of wet processing electronic components having surfaces containing tantalum. In the methods of the present invention, tantalum-containing electronic components are contacted with a tantalum processing fluid comprising a tantalum oxidizing solution containing an oxidizing agent and a fluorine ion producing agent.
申请公布号 US2002119245(A1) 申请公布日期 2002.08.29
申请号 US20020074516 申请日期 2002.02.13
申请人 VERHAVERBEKE STEVEN 发明人 VERHAVERBEKE STEVEN
分类号 C23F1/26;H01L21/3213;(IPC1-7):B05D5/12;B05D1/18;B05D3/10 主分类号 C23F1/26
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