摘要 |
In order to mount a diamond (7) in a dop (31) so that the diamond table (7a) is level and at a predetermined height, the diamond (7) is positioned in an injection moulding tool so that is table (7a) is engaged with the underside of a top plat (55), the diamond (7) being pushed upwards by an insert (54). An elastomer (35) is injection moulded into a dop ring (32) and holds the diamond (7) securely in the dop ring (32) in that there is elastomer (35) both in front of and behind the girdle (7c) of the diamond 7). Although some shrinkage of the elastomer (35) can occur, the table 7a of the diamond is set strictly parallel to the upper and lower surfaces of the dop ring (32) and the table (7a) is just slightly below the plane defined by the top of the dop ring (32). In this way, the dop (31) can be placed on the table of an apparatus for forming the mark by microlithography, after applying a photoresist to the diamond table 7a. In order to bake the resist, the dop 31 is placed over the heater tip (63) of a Peltier heat pump which has a cavity (64) containing a drop of solder, in order rapidly to heat up the diamond (7), control the duration and temperature of baking time, and rapidly cool the diamond (7). |
申请人 |
GERSAN ESTABLISHMENT;WILLIS, MAXWELL, RALPH;CROWDER, MICHAEL, JOHN;GUY, KEITH, BARRY;SMITH, JAMES, GORDON, CHARTERS |
发明人 |
WILLIS, MAXWELL, RALPH;CROWDER, MICHAEL, JOHN;GUY, KEITH, BARRY;SMITH, JAMES, GORDON, CHARTERS |