CASSETTE BUFFERING WITHIN A MINIENVIRONMENT

摘要

A SMIF interface is disclosed for buffering one or more cassettes (110) within a mini-environment (120) affixed to a process tool. The interface includes a load port formed of a port door (112) and a port plate (114) circumjacent thereabout, and a minienvironment mounted to the port plate. The SMIF interface and/or process tool includes at least one shelf (121) for storing a cassette after the load port separates the cassette from its transport pod (106). In operation, while a first cassette is located within the process tool, a second pod is seated on the load port, the cassette is separated from the pod, and the cassette is stored on a storage shelf. When processing on the first cassette is completed, the second cassette is loaded onto the processing tool. The first cassette is returned to the pod and removed from the load port. By providing a buffer of cassettes within the minienvironment of the SMIF interface, the processing tool is no longer dependent on timely delivery of pods to the interface to ensure that the process tool does not sit idle.