发明名称 |
ELECTRODE ARRANGEMENT FOR CHARGE STORAGE AND CORRESPONDING PRODUCTION METHOD |
摘要 |
The invention relates to an electrode arrangement for charge storage with an external trench electrode (202; 406), embodied along the wall of a trench provided in a substrate (401) and electrically insulated on both sides in the trench by a first and a second dielectric (104; 405, 409); an internal trench electrode (201; 410), serving as counter-electrode to the external trench electrode (201; 406) and insulated by the second dielectric (104; 409) and a substrate electrode (201; 403), which is insulated by the first dielectric (104; 405) outside the trench, which serves as counter-electrode to the external trench electrode (202; 406) and is connected to the internal trench electrode (201; 410) in the upper trench region. |
申请公布号 |
WO02067330(A2) |
申请公布日期 |
2002.08.29 |
申请号 |
WO2002EP01800 |
申请日期 |
2002.02.20 |
申请人 |
INFINEON TECHNOLOGIES AG;GOLDBACH, MATTHIAS;HECHT, THOMAS |
发明人 |
GOLDBACH, MATTHIAS;HECHT, THOMAS |
分类号 |
H01L27/108;H01L21/8242 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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