发明名称 |
Method for manufacturing liquid discharge head |
摘要 |
A first gap formation member and a fixed portion are provided on an element substrate, a movable member is formed on the first gap formation member and the fixing member, and a second gap formation member is formed thereon. The first gap formation member is removed, a wall material is coated and exposed at a pattern mask. The wall material is patterned to form the liquid flow path walls and the liquid supply ports altogether, and removing the second gap formation member, hence making it easier to form the side stopper that supports the movable member stably in a state where the displacement of the movable member is regulated to close the liquid supply port, as well as the minute gap between the movable member and the side stopper in higher precision. <IMAGE> |
申请公布号 |
EP1127693(A3) |
申请公布日期 |
2002.08.28 |
申请号 |
EP20010103459 |
申请日期 |
2001.02.14 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KUBOTA, MASAHIKO;TAKENOUCHI, MASANORI;KUDO, KIYOMITSU;INOUE, RYOJI |
分类号 |
B41J2/04;B41J2/05;B41J2/16;B81B7/02;B82B3/00 |
主分类号 |
B41J2/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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