发明名称 Semiconductor device using nitride compound and method for fabricating the same
摘要 <p>An insulating-gate semiconductor device has a first nitride semiconductor layer formed over a substrate and an insulating oxidation layer obtained by oxidizing a second nitride semiconductor layer formed on the first nitride semiconductor layer. A gate electrode is formed on the insulating oxidation layer. <IMAGE></p>
申请公布号 EP1235279(A2) 申请公布日期 2002.08.28
申请号 EP20020003376 申请日期 2002.02.13
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 NISHII, KATSUNORI;INOUE, KAORU;MATSUNO, TOSHINOBU;IKEDA, YOSHITO;MASATO, HIROYUKI
分类号 H01L21/335;H01L29/20;H01L29/778;(IPC1-7):H01L29/778 主分类号 H01L21/335
代理机构 代理人
主权项
地址