Cmos/mems integrated ink jet print head with elongated bore and method of forming same

摘要

A continuous ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. An insulating layer or layers overlies the silicon substrate includes conductors at various levels to provide conductive paths for transmitting control signals for controlling the print head. The insulating layer or layers also has a series or an array of nozzle openings or bores formed therein along the length of the substrate to provide a substantially planar surface to facilitate cleaning of the printhead. Each nozzle opening is formed as an elongated bore that extends through the insulating layer or layers to the silicon substrate. A heater element is formed adjacent each nozzle opening and in proximity to the planar surface to provide asymmetric heating of the ink stream as it leaves the nozzle opening. <IMAGE>