发明名称 Method and apparatus for optimizing the output beam characteristics of a laser
摘要 <p>The use of refractive optical elements to reduce or eliminate unwanted wavelength components from a laser emission. The method and apparatus described herein introduces modifications to the parallelism of one or more existing optical elements within the laser to dispersively separate wavelength components of the laser emission. According to embodiments of the invention, modifications in the parallelism can be made to the output coupler, intra-cavity polarizing optical components, and extra-cavity beamsplitter to accomplish separation of wavelength components without the introduction of additional optical components or reduction in the operating capacity of the laser. Additional optical components can be used to accomplish further separation of the wavelength components after the laser beam leaves the laser resonator. &lt;IMAGE&gt;</p>
申请公布号 EP1235314(A2) 申请公布日期 2002.08.28
申请号 EP20020003837 申请日期 2002.02.20
申请人 ASML US, INC. 发明人 BITTENSON, STEVEN N.
分类号 G03F7/20;G02B5/04;G02B27/12;G02B27/18;H01L21/027;H01S3/00;H01S3/08;H01S3/10;H01S3/225;(IPC1-7):H01S3/08 主分类号 G03F7/20
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