| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of deformation in the circumference of the central part of a stamper in an electroforming stage where a mother stamper is produced from a stamper. SOLUTION: The method for producing a stamper is provided with a stage where a photoresist layer is formed on a glass original plate; a stage where the photoresist layer is exposed; a stage where the photoresist layer is developed; a stage where an electrically conductive film is deposited on the surface of the photoresist layer; a stage where an electroforming is deposited on the electrically conductive film, and the electroforming is peeled from the glass original plate to produce a first stamper; a stage where the first stamper is fitted to the cathode together with a substrate consisting of glass or ceramics, and energizing is performed to the outer circumferential section of the first stamper and the cathode to deposit the electroforming on the surface of the first stamper, so that a second stamper is produced.
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