| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional displacement sensor by which the displacement in three axial directions of a specimen can be measured with a simple constitution, with satisfactory efficiency and precisely. SOLUTION: A right-triangle platelike magnet 11 which is magnetized in the thickness direction is attached to the displacement measuring part of the specimen 10. A magnetic-field detection means 20 formed by arranging a plurality of Hall elements 20a to 20n in a row is installed in the same direction as a side parallel to the Y-axis from among two orthogonal sides of the magnet 11. By the elements 20a to 20n, a magnetic field in the thickness direction from the magnet 11 is detected and the displacement in the three axial directions of the specimen 10 is measured.
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