| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an electrostatic ink jet head by reducing shape variation of a gap between a diaphragm and a counter electrode, in an electrostatic ink jet head which can drive at a low voltage, and is highly stable and reliable. SOLUTION: The shape of the gap G between the diaphragm 22 and the counter electrode is defined by a first non-parallel part G1 not parallel to the diaphragm 22, a second non parallel part G2 having a larger tilt than a tilt of the first non parallel part, and a parallel part G3 parallel to the diaphragm. A resist pattern is formed to a joint face region to be jointed to a diaphragm substrate on an insulating film 12 which becomes an electrode substrate, and to the first non-parallel region G1 correspondingly to positions of the non-parallel gaps G1 and G2, A resist shape is transferred by a predetermined ratio to the electrode substrate by etching the electrode substrate and the resist simultaneously.
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