ANGULAR VELOCITY SENSOR, ACCELERATION SENSOR AND ANGULAR VELOCITY/ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor having a simple structure and capable of detecting angular velocity with high sensitivity. SOLUTION: In the angular velocity sensor 10, a weight attaching part 13a and a weight 14 are combined at the central region of a vibrator 12 to form a superposed part consisting of the weight attaching part 13a and the weight 14 and four vibration generation members 15a-15d are integrally provided to four arm parts 13c1-13c4 in order to vibrate the superposed part through four torsion spring arts 13b1-13b4 and four arm parts 13c1-13c4 while four vibration detection members 16a-16d are integrally provided to four torsion spring parts 13a and 14 in order to detect the Coriolis force applied to the superposed part consisting of the weight attaching part 13a and the weight 14 when angular velocity is applied to calculate the angular velocity. The respective outputs of four vibration detection members 16a-16d are combined to perform addition and subtraction to detect the angular velocities in X-axis and Y-axis directions.