| 摘要 |
PROBLEM TO BE SOLVED: To prevent lowering of pressure measurement accuracy even when being affected by parasitic capacitance, and execute miniaturization. SOLUTION: This pressure sensor 27 comprising an insulating substrate 29 having a fixed electrode 45, and a diaphragm 31 equipped with a movable electrode, for being displaced in response to an applied pressure is equipped with a uniform displacement part 75 for displacing uniformly the movable electrode relative to the fixed electrode 45 in the displacement direction of the diaphragm 31 when the diaphragm 31 is displaced in response to the pressure, and a piezoelectric member 33 interposed between the insulating substrate 29 and the diaphragm 31, for being expanded or contracted by application of a voltage. When the diaphragm 31 is displaced in response to the pressure, a voltage corresponding to the pressure is applied to the piezoelectric member 33 to move the insulating substrate 29, and the distance between the facing surfaces of the fixed electrode 45 and the movable electrode is kept at a prescribed pitch, and the pressure is measured by the voltage applied to the piezoelectric member 33.
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