| 摘要 |
PROBLEM TO BE SOLVED: To strictly perform a dimensional control of a gap of a shutter and a transport port of a casing in the processing device. SOLUTION: A planar shutter 71 for opening and closing the transport port 70 is mounted on a side wall R side of the casing 60. The shutter 71 is supported by three supports including a support 73c at three portions and the three supports can be moved in the vertical direction by a driving part. The shutter 71 is provided so that a gap D with the side wall of the casing 60 may be reduced to 0.5 mm. By this constitution, the shutter 71 is capable of moving in the vertical direction along the side wall R of the casing 60, maintaining the gap D, and the dimensional control of the gap D between the shutter 71 and the transport port 70 is strictly performed. |
