| 发明名称 |
WIRE BONDING, SEVERING, AND BALL FORMING |
| 摘要 |
A method of stimulating production of photo-electrons at a cathode element (118) of an EFO system (116) of a wire bonder (100) is disclosed. Said method comprises illuminating the cathode element (118) of the EFO component with ultraviolet light having sufficient energy to stimulate the production of photo-electrons at the cathode element (118). <IMAGE> |
| 申请公布号 |
EP0837750(B1) |
申请公布日期 |
2002.08.28 |
| 申请号 |
EP19960916733 |
申请日期 |
1996.05.24 |
| 申请人 |
FORMFACTOR, INC. |
发明人 |
ELDRIDGE, BENJAMIN, N.;MATHIEU, GAETAN, L. |
| 分类号 |
B23K9/067;B23K20/00;C23C18/16;C25D5/08;C25D5/22;C25D7/12;C25D21/02;G01R1/067;G01R1/073;G01R3/00;G01R31/28;H01L21/00;H01L21/48;H01L21/56;H01L21/60;H01L21/603;H01L21/66;H01L23/48;H01L23/485;H01L23/49;H01L23/498;H01L25/065;H01L25/16;H05K1/14;H05K3/20;H05K3/32;H05K3/34;H05K3/36;H05K3/40 |
主分类号 |
B23K9/067 |
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