STRUCTURE AND FABRICATING METHOD OF MICRO MIRROR ARRAY FOR FREE SPACE OPTICAL SWITCH USING MICRO-ELECTRIC AND MECHANICAL SYSTEM AND MULTI-DIMENSIONAL OPTICAL SWITCHING METHOD USING THE SAME

摘要

PURPOSE: A structure and a fabricating method of a micro mirror array for free space optical switch using a micro-electric and mechanical system and a multi-dimensional optical switching method using the same are provided to control an angle of an optical mirror by varying a drive angel of an actuator formed under a tilting micro mirror. CONSTITUTION: A biaxial tilting micro mirror is formed with a drive circuit portion for switching a particular micro mirror(210) of a micro mirror array, four piezoelectric actuators(202) for rotating the micro mirror(210) toward an X-axis direction and a Y-axis direction. An optical reflection portion(203) is used for reflecting an incident ray. A uniaxial tilting micro mirror is formed with a drive circuit portion, an optical reflection portion(203), and two piezoelectric actuators(202) formed on the Y-axis. The piezoelectric actuators(202) are connected with the optical reflection portion(203) by a post.