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发明名称
COMPACT GATE VALVE
摘要
申请公布号
EP1234133(A1)
申请公布日期
2002.08.28
申请号
EP20000982295
申请日期
2000.11.29
申请人
WAFERMASTERS, INCORPORATED;TOKYO ELECTRON LIMITED
发明人
YOO, WOO, SIK;KURIBAYASHI, HIROMITSU
分类号
F16K3/12;F16K51/02;H01L21/02;H01L21/677;(IPC1-7):F16K51/02
主分类号
F16K3/12
代理机构
代理人
主权项
地址
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