| 摘要 |
<p>PROBLEM TO BE SOLVED: To permit scanning with accuracy higher than the accuracy of scanning of a laser beam with only the galvanometer using an optical encoder. SOLUTION: The laser beam emitted by a laser oscillator 1 is received at an incident angleΘby an opto-acoustic diffraction element 2 and the vibration of a frequency F+ΔF changed from the vibration of a predetermined frequency F is added thereto, by which the laser beam is emitted at an exist angleΘ+ΔΘ. The laser beam emitted by the opto-acoustic diffraction element 2 is received by the galvanometer provided with the optical encoder 4 having a predetermined accuracy. The received laser beam is reflected while the reflection direction is fluctuated by the predetermined accuracy and the laser beam is refracted and cast by the fθlens 6, by which the predetermined irradiation surface is scanned with the laser beam received by the galvanometer 5.</p> |
