| 摘要 |
PURPOSE: A method of manufacturing a display device is provided to prevent contamination of the MgO layer. CONSTITUTION: A MgO layer(4) is deposited on the top surface of the dielectric layer which is deposited on the top surface of the upper substrate(1). A protection layer(5) is formed by coating liquid coatings on the upper surface of the MgO layer(4). The upper substrate(1) having the protection layer(5) is mounted on the chamber, and then the protection layer(5) is removed by using oxide plasma. The upper substrate and a lower substrate are sealed and air of discharge space is exhausted. |
