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发明名称
METHOD FOR RAPID THERMAL PROCESSING OF SUBSTRATES
摘要
申请公布号
EP1234328(A2)
申请公布日期
2002.08.28
申请号
EP20000992125
申请日期
2000.10.23
申请人
JETEK, INC.
发明人
BOLLINGER, LYNN, DAVID;TOKMOULINE, ISKANDER
分类号
H01L21/22;H01L21/00;H01L21/223;H01L21/265;H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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