ANGULAR VELOCITY SENSOR AND ITS CHARACTERISTICS ADJUSTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor and its characteristics adjusting method which improves its output characteristics so that the weights of a first and second oscillators can be balanced strictly. SOLUTION: A cut 31b having a surface roughness of 2 μm or less is provided on the ridge of a first oscillator 21 and/or the ridge of a second oscillator 26 so that the weight balance of the first and second oscillators 21, 26 can be adjustable strictly.