| 摘要 |
PROBLEM TO BE SOLVED: To provide the leakage inspection method of an air filter for reducing the probability, where the count of transmission particle from a normal section is mistaken as the count of leaked particles from a leakage section with fixed reliability, and for minimizing the increase in leakage inspection time by misjudgement. SOLUTION: In the air filter leakage inspection of the ISO standards proposal, first and second statistical methods are shown. In the first statistical method, required time Tt for inspecting leakage is calculated directly, and an allowable observation value Ka for minimizing the required time is obtained. In the second statistical method, elements are adjusted for fully differentiating a count value from the filter normal section from a count value from leakage. Also, a successive examination method for minimizing the required time for still remeasurement that is made, when no decision is made by scanning measurement is shown in two ways. Furthermore, a method is shown for accurately returning a probe to a suspicious position, where no decision has been made by a scanning test.
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