发明名称 WAFER PROBE
摘要 PROBLEM TO BE SOLVED: To propose a multi-contact type probe easy to construct, used for high-frequency test of an integrated circuit or other microelectronic elements. SOLUTION: This probe is equipped with a substantially rigid support part and a multitude of contact fingers supported by and extending from the support part. The contact fingers are disposed as an integral assembly, thereby keeping the multitude of contact fingers in a prescribed arrangement when they are mounted on the support body.
申请公布号 JP2002243761(A) 申请公布日期 2002.08.28
申请号 JP20010369651 申请日期 2001.12.04
申请人 CASCADE MICROTECH INC 发明人 HAYDEN LEONARD;MARTIN JOHN;ANDREWS MIKE
分类号 G01R31/26;G01R1/06;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
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