| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic member which has fine projections formed on the surface of the member and exhibits an excellent anchoring effect on a different kind of substance that is deposited and built up on the surface of the member, while inhibiting or preventing gas-releasing properties of the member from being exhibited, and when used in a thin-film formation device, peeling-off of particles of such a different kind of substance from the member is hardly caused, and also to provide a production process of the ceramic member. SOLUTION: In the ceramic member, a plurality of fine projections are formed on the surface of each of most of the constituent crystal grains of the surface or its vicinity of a dense ceramic base material having a >=95% purity and each of the plurality of fine projections has a smaller size than the crystal grain size. The production process of such a ceramic member comprises subjecting a dense ceramic base material which has a >=95% purity and a density exceeding 90% of the theoretical density, to etching treatment with an acidic etching liquid, to form the plurality of projections on the surface of each of most of the crystal grains existing in the surface or in the vicinity of the surface of the base material. |
