| 发明名称 |
LIGHT SENSITIVE COMPOSITION CONTAINING AN ARYLHYDRAZO DYE |
| 摘要 |
A light-sensitive positive photoresist composition containing a film forming resin, a photoactive compound, a solvent, and an arylhydrazo dye. The dyed photoresist reduces the linewidth variation of the resist pattern on a reflective substrate while giving good lithographic performance. |
| 申请公布号 |
EP0929843(B1) |
申请公布日期 |
2002.08.28 |
| 申请号 |
EP19970910366 |
申请日期 |
1997.09.26 |
| 申请人 |
CLARIANT FINANCE (BVI) LIMITED |
发明人 |
DING, SHUJI;LU, PING-HUNG;KHANNA, DINESH, N.;CORSO, ANTHONY, J. |
| 分类号 |
G03F7/004;C08L5/00;C08L101/00;C09B23/00;C09B29/32;C09B55/00;G03F7/039;G03F7/09;H01L21/027 |
主分类号 |
G03F7/004 |
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