| 摘要 |
<p>A stage device includes a table (1) having a reference plane parallel to first and second directions (X,Y); a driving body (41) movable along the first direction (X); a moving body (3) movable along the second direction (Y) with respect to the driving body; a static pressure bearing (64,631) provided on the moving body: an exhaust groove (712,712-2) provided surrounding the static pressure bearing; and a mechanism (812,821,822,831) for delivering a gas of the static pressure bearing recovered by the exhaust groove (712-2) between the moving body (3) and the driving body (41). The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.</p> |
