| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical integrated element in which a plurality of semiconductor optical elements are integrated by a butt joint connection and which has a small coupling loss and high reliability by reducing the occurrence of a level difference or a space at the butt joint connecting part of an optical waveguide layer. SOLUTION: After a dielectric mask is formed on a part of a first semiconductor optical element and a first optical waveguide layer is removed by dry etching, a side etching of a suitable amount for the first optical waveguide layer is formed by wet etching. Thereby, in the butt joint connection of a second optical waveguide layer by MOVPE selective growth, both optical waveguides are connected continuously with nearly the same film thickness. |
