| 摘要 |
PROBLEM TO BE SOLVED: To provide an energizing mechanism for opening and closing a gate valve between a sample exchange chamber (auxiliary exhaust chamber) for mounting and removing a sample and a sample chamber in a device such as a testing device, a machining device or a plotting device using a charged particle beam. SOLUTION: This energizing mechanism is provided with a slider 2 rectilinearly moved by elongation and contraction of a rod 11 of a driving source 1 of an air cylinder or the like, a roller 63 rotatably fitted to the slider 2 through a pin 62 to roll on the surface of the guide 21, a link 3, one end of which is rotatably fitted to the slider 2 through the pin 62, a lever 4 rotatably fitted to the other end of the link 3 through a pin 61, and a shaft 5 fitted to the lever 4, thereby opening and closing the gate valve with rotation of the shaft 5. When the driving source 1 is driven to elongate the rod 11, the force is transmitted to the slider 2, the pin 52, the link 3, the pin 61, the lever 4 and the shaft 5, and in the vicinity of the end point of driving operation for elongating the rod 11, the turning torque of the shaft 5 is increased. |
