TWO AXIS NAVIGATION GRADE MICROMACHINED ROTATION SENSOR SYSTEM

摘要

A mounting plate is placed in a housing with a plurality of compliant, damped pads arranged between the housing and the mounting plate. A hub arranged to produce rotational oscillations about a drive axis extends from the mounting plate, and a first drive member is connected to the hub. A first sensing apparatus having a support element is connected to the drive member to transmit rotational oscillations of the drive member about the drive axis to the support element. The first sensing apparatus includes a sensing element connected to the support element and arranged to oscillate with the support element about the drive axis. The sensing element is arranged to oscillate rotationally relative to the support elemen t about a sensing axis perpendicular to the drive axis for input rotation rate s of the frame about an input axis which is perpendicular to both the sensing axis and the drive axis. A second drive member is connected to the first drive member and is arranged to produce rotational oscillations about the drive axis that are opposite in direction to the rotational oscillations produced by the first drive member. The second sensing apparatus has a second sensing element arranged to oscillate rotationally relative to the support element about second sensing axis that is parallel to the first sensingaxis.