| 摘要 |
The present invention relates to a two-phase scanning method and apparatus for obtaining information necessary to analyze physical properties of materials using a scanning probe microscope. The scanning operation of the present invention is divided into two phases. First, in order to obtain information on a surface of a sample, a first scan is provided while the probe moves along the sample surface. Based upon results of the first scan, an imaginary line is defined on an average plane of the sample surface. Then, an imaginary plane, one side of which intersects the imaginary line and makes a predetermined angle with reference to the average plane, is defined over an area of interest on the sample surface. The probe is then positioned at a predetermined height on the imaginary inclined plane, and a second scan is provided during downward movement of the probe along the imaginary inclined plane.
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