发明名称 |
Multi-anode device and methods for sputter deposition |
摘要 |
A method and apparatus for vacuum coating plural articles employs a drum work holder configuration and a sputter source with a plurality of individually controlled anodes for effectively providing uniform coatings on articles disposed at different locations on the drum work holder. A small number of measured process parameters are used to control a small number of process variable to improve coating uniformity from batch to batch.
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申请公布号 |
US6440280(B1) |
申请公布日期 |
2002.08.27 |
申请号 |
US20000605401 |
申请日期 |
2000.06.28 |
申请人 |
SOLA INTERNATIONAL, INC. |
发明人 |
BURTON CLIVE H.;PRATT RODNEY;SAMSON FRANK |
分类号 |
C23C14/00;C23C14/35;C23C14/50;C23C14/54;H01J37/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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