| 发明名称 |
Near field optical scanning system employing microfabricated solid immersion lens |
| 摘要 |
A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.
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| 申请公布号 |
US6441359(B1) |
申请公布日期 |
2002.08.27 |
| 申请号 |
US19990414674 |
申请日期 |
1999.10.07 |
| 申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
COZIER KENNETH B.;FLETCHER DANIEL A.;KINO GORDON S.;QUATE CALVIN F.;SOH HYONGSOK T. |
| 分类号 |
G01Q10/00;G01Q60/18;G01Q60/22;G03F7/20;G11B7/135;G11B11/105;(IPC1-7):G02B7/02;G02B21/06 |
主分类号 |
G01Q10/00 |
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