发明名称 |
Methods for manufacture of self-aligned integrally gated nanofilament field emitter cell and array |
摘要 |
The present invention discloses a new field emitter cell and array consisting of groups of nanofilaments forming emitter cathodes. Control gates are microprocessed to be integrally formed with groups of nanofilament emitter cathodes on a substrate. Groups of nanofilaments are grown directly on the substrate material. As a result, the control gates and groups of nanofilaments are self-aligned with one another.
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申请公布号 |
US6440763(B1) |
申请公布日期 |
2002.08.27 |
申请号 |
US20010813859 |
申请日期 |
2001.03.22 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
HSU DAVID S. Y. |
分类号 |
H01J1/304;H01J3/02;H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
H01J1/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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