发明名称 |
Method for fabricating a semiconductor component having a wiring which runs piecewise in the substrate, and also a semiconductor component which can be fabricated by this method |
摘要 |
A method for fabricating a wiring which runs at least piecewise in a substrate. At least one conductive connection runs in the semiconductor substrate and at least one conductive connection runs on the semiconductor substrate being provided. The semiconductor component enables applications in which high security against external manipulations is important.
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申请公布号 |
US6440827(B2) |
申请公布日期 |
2002.08.27 |
申请号 |
US20010853521 |
申请日期 |
2001.05.11 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
BRAUN HELGA;KAKOSCHKE RONALD;STOKAN REGINA;KUX ANDREAS;PLASA GUNTHER |
分类号 |
H01L23/52;H01L21/285;H01L21/3205;H01L21/8238;H01L23/58;H01L27/092;(IPC1-7):H01L21/425 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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