Apparatus and method for loading substrates of various sizes into substrate holders

摘要

An apparatus and method for loading substrates of various sizes into a substrate holder. The apparatus for this purpose comprises a base plate with peripheral rim and at least three support means arranged on the base plate, each of which has configured on it different support surfaces for the various substrates. The support surfaces are arranged in stepped fashion on the support means. In addition, receiving elements for the substrate holder are arranged on the base plate in such a way that the substrate holder that is set in place surrounds the support means and is aligned and oriented in terms of its position. At least one sensor element is housed in at least one of the support surfaces of a support means for one substrate size, so as thereby to detect the size of the substrate.