发明名称 |
Semiconductor structures, methods of implanting dopants into semiconductor structures and methods of forming CMOS constructions |
摘要 |
The invention includes a method of implanting dopants into a semiconductor structure wherein a lateral periphery of a photoresist mask is shifted after implanting a first dopant and prior to implanting a second dopant. The invention also includes semiconductor structures having two doped regions of a semiconductive material separated by a region less heavily doped than the doped regions.
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申请公布号 |
US6440799(B1) |
申请公布日期 |
2002.08.27 |
申请号 |
US20010881308 |
申请日期 |
2001.06.13 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
TRIVEDI JIGISH D. |
分类号 |
H01L21/266;H01L21/8238;(IPC1-7):H01L21/824;H01L21/336 |
主分类号 |
H01L21/266 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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