| 发明名称 |
Nanoparticles formed with rigid connector compounds |
| 摘要 |
The present invention relates to a novel organosilicon particle having the formula SiaObCcHd. The particle may be coated with an organic film, preferably a rigid connector compound. The present invention also provides a method of using the organosilicon particle and/or rigid connector compound in the formation of a low-k dielectric film.
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| 申请公布号 |
US6440560(B1) |
申请公布日期 |
2002.08.27 |
| 申请号 |
US19990361396 |
申请日期 |
1999.07.26 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GATES STEPHEN MCCONNELL;MURRAY CHRISTOPHER BRUCE |
| 分类号 |
C08K9/04;(IPC1-7):B32B5/16 |
主分类号 |
C08K9/04 |
| 代理机构 |
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