| 摘要 |
PROBLEM TO BE SOLVED: To efficiently discharge air and mist while more stably controlling the operation. SOLUTION: When a spin table 3 is rotated at the time of forming a thin film on a substrate 2, a blade 14 is rotated synchronously with the rotation of the spin table 3 to more reduce the number of rotation as compared to that of the spin table 3 and the downward flow of air is generated by the rotation of the blade 14. The air flowing in a spin cap 6 or the mist of an excess coating liquid moves forcibly under the blade 14 by the air flow to avoid the substrata 2 on the spin table 3. As a result, it is suppressed that the coating liquid R at the time of forming the thin film on the substrate 2 is affected by the air, and the thickness of the formed thin film is more uniformized.
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