REACTION DEVICE BY CORPUSCULAR RAY IRRADIATION

摘要

PROBLEM TO BE SOLVED: To solve problems generated by colliding a corpuscular ray with the thin sealing film stretched over an opening formed in the sidewall of a reaction vessel, in a reaction device by corpuscular ray irradiation for carrying out the required reaction of gas in the reaction vessel by irradiating through the opening the gas in the reaction vessel with the corpuscular ray such as an electron beam. SOLUTION: This reaction device by corpuscular ray irradiation has the reaction vessel 15 and a corpuscular ray irradiation device for irradiating the inside of reactor vessel with the corpuscular ray through an irradiation hole 11 installed on the outside of the reaction vessel and in the sidewall of the reaction vessel. The reaction device is characterized in that the irradiation device is provided with a corpuscular ray irradiation source and an optical system where the corpuscular ray generated in the corpuscular ray irradiation source is oriented to the irradiation hole with the diameter of the corpuscular ray stopped down at the irradiation hole and that the irradiation hole is slightly larger in diameter than the diameter of the stopped corpuscular ray.