发明名称 Magnetic energy filter
摘要 A compact magnetic energy filter having at least four magnetic fields to deflect the trajectory of an electron beam from the entrance window to the exit slit. A rotational symmetry axis is located midway between the second and third magnetic fields. The magnetic fields on the opposite sides of the rotational symmetry axis are opposite in polarity.
申请公布号 US6441378(B1) 申请公布日期 2002.08.27
申请号 US20000585852 申请日期 2000.06.01
申请人 JEOL LTD. 发明人 TSUNO KATSUSHIGE;MUNRO ERIC;ROUSE JOHN
分类号 G01B11/24;G01B11/245;G01B21/20;H01J37/05;H01J49/30;(IPC1-7):G21K1/08;H01J3/14;H01J3/26;H01J9/42;H01J40/00;H01J47/00 主分类号 G01B11/24
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