发明名称 |
Magnetic energy filter |
摘要 |
A compact magnetic energy filter having at least four magnetic fields to deflect the trajectory of an electron beam from the entrance window to the exit slit. A rotational symmetry axis is located midway between the second and third magnetic fields. The magnetic fields on the opposite sides of the rotational symmetry axis are opposite in polarity.
|
申请公布号 |
US6441378(B1) |
申请公布日期 |
2002.08.27 |
申请号 |
US20000585852 |
申请日期 |
2000.06.01 |
申请人 |
JEOL LTD. |
发明人 |
TSUNO KATSUSHIGE;MUNRO ERIC;ROUSE JOHN |
分类号 |
G01B11/24;G01B11/245;G01B21/20;H01J37/05;H01J49/30;(IPC1-7):G21K1/08;H01J3/14;H01J3/26;H01J9/42;H01J40/00;H01J47/00 |
主分类号 |
G01B11/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|