Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film

摘要

A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.