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申请公布号
JP3318813(B2)
申请公布日期
2002.08.26
申请号
JP19950047775
申请日期
1995.02.13
申请人
发明人
分类号
H01L21/28;H01L21/304;H01L21/3205;H01L21/3213;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/320
主分类号
H01L21/28
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