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发明名称
摘要
申请公布号
JP3317991(B2)
申请公布日期
2002.08.26
申请号
JP19920075284
申请日期
1992.02.26
申请人
发明人
分类号
H01L21/302;H01L21/306;H01L21/3065;H01L33/00;H01S5/00;H01S5/042;H01S5/227;(IPC1-7):H01S5/227
主分类号
H01L21/302
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代理人
主权项
地址
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