| 摘要 |
PROBLEM TO BE SOLVED: To improve the adhesiveness of a bar of a slider of a magnetic head to a substrate for working when a floating surface of the bar is worked by preventing the generation of a residue on a flank of the slider. SOLUTION: The plural bars 2 are adhered and fixed (Figure 3 (a)) to the substrate 50 with the floating surfaces 6 as top surfaces and after resins 10 are packed between the bars 2 and are cured, protective layers 5 of carbon are formed on the floating surfaces 6 (Figure 3 (b)). As a result, the residues of the carbon on the flanks of the bars 2 can be prevented. After rear surfaces 9 on the side opposite to the floating surfaces 6 of the bars 2 are rubbed (Figure 3 (c)), the bars are again fixed to the substrate 50b (Figure 3 (d)) and the rear surfaces are roughened (Figure 3 (e)). The substrate 50a is stuck to the roughened rear surfaces 9 (Figure 3 (f)) and the substrate 50b is peeled to form the floating surfaces 6 side as the top surface (Figure 3 (g)). Then, the resins 10 are packed between the bars 2 and are cured. The floating surfaces 6 are worked (Figure 3 (i) to (n)) by ion milling and reactive ion etching using a photoresistor.
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