发明名称 DEVICE AND METHOD FOR FILM FORMATION
摘要 PROBLEM TO BE SOLVED: To provide a film forming device and a method therefor in which film-forming defects or discharging flaws are eliminated even in the film formation on the surface of a soft sheet, and in which stable film-forming is possible continuously and for a long period. SOLUTION: In the film-forming device 1 which has a vacuum chamber 2 capable of holding a vacuum state and which forms a film on the surface of a base material inside the vacuum chamber 2, there are provided a transporting means that runs a continuous sheet 3 as the base material in the up-and-down direction and a film-forming means that continuously performs film-forming on the surface of the sheet 3. In addition, the film-forming means is installed in a pair vertically to the horizontal direction, in a manner that the continuous sheet 3 running in the up-and-down direction is held in between.
申请公布号 JP2002235171(A) 申请公布日期 2002.08.23
申请号 JP20010030061 申请日期 2001.02.06
申请人 BRIDGESTONE CORP 发明人 YOSHIKAWA MASAHITO;IWABUCHI YOSHINORI;ONO SHINGO;KUSANO YUKIHIRO
分类号 C23C14/20;C23C14/56;D06M11/00;D06M11/83;(IPC1-7):C23C14/56 主分类号 C23C14/20
代理机构 代理人
主权项
地址