发明名称 MASK
摘要 PROBLEM TO BE SOLVED: To provide a large mask of high masking accuracy without any thermal deformation of a pattern aperture. SOLUTION: This mask 10 is a vapor deposition mask used when depositing a metal film of a predetermined shape on a glass substrate by a vapor deposition method, and comprises a rectangular frame 20 having, on the four sides thereof, first to fourth frame members 12, 14, 16 and 18 successively connected to each other at ends, and a large number of mask stripes 22 connected to the first and the third frame members 12 and 16 at both ends and extended in the y-axis direction separate from each other. The mask stripes 22 are belt- like members of the same width, and disposed in a sun-shade screen at same intervals, and a large number of belt-like pattern apertures 24 having the same width and length are demarcated by the mask stripe 22 adjacent to each other. One end 22a of each mask stripe 22 is connected to the first frame member 12 via a tensile coil spring 26.
申请公布号 JP2002235165(A) 申请公布日期 2002.08.23
申请号 JP20010031844 申请日期 2001.02.08
申请人 SONY CORP 发明人 KOTAKE RYOTA
分类号 H05B33/10;C23C14/04;H01L51/50;H05B33/12;H05B33/14;(IPC1-7):C23C14/04 主分类号 H05B33/10
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