| 摘要 |
PROBLEM TO BE SOLVED: To obtain superior reproducibility on the obtained measured result of the shape and size of an object to be inspected, even if complete reproducibility is not obtained on methods or the like for holding and conveying the object to be inspected and mounting the object on a mounting base. SOLUTION: In the measuring device for measuring an object 8 to be inspected for measuring the shape and size by putting it on the mounting base 5, the mounting base 5 has floating means (7, 6) for floating the object 8 to be inspected by air pressure, before a measurement is performed.
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