| 摘要 |
PROBLEM TO BE SOLVED: To stably control a panel temperature uniformly at a low temperature during regeneration. SOLUTION: A pipe 8 is provided on a panel 6 of the cold trap 1. A nitrogen cylinder 11 is connected to the pipe 8 through a passage 10 wherein a motor- operated valve 9 is provided. A control unit 13 transmits a control signal to a valve driver 15 so as to release the motor-operated valve 9 when a regeneration cycle period passes. Thus, a panel 6 is uniformly heated and regeneration processing can be performed without stopping operation of a refrigerator 3. Therefore, the temperature of the panel 6 can be stably controlled at the low temperature, -70 deg.C, and water molecules frozen and collected can be sublimed.
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