发明名称 THIN-FILM MAGNETIC HEAD
摘要 PROBLEM TO BE SOLVED: To reduce a level difference in machining of a floating surface in the process of polishing and machining of a magnetic head made of materials different in hardness. SOLUTION: The thickness of an insulating film formed on a substrate having high hardness is set to be 0.05 to 0.5μm, and the insulating film is polished by using a surface plate made of a material having relatively low hardness. Thus, machining level difference is set equal to/lower than 1 nm, and average surface roughness is set equal to/lower than 10 nm.
申请公布号 JP2002237008(A) 申请公布日期 2002.08.23
申请号 JP20010031701 申请日期 2001.02.08
申请人 HITACHI LTD 发明人 CHIBA HIROSHI;FURUSAWA KENJI;TAMURA TOSHIO;OCHIAI YUJI
分类号 G11B5/39;G11B5/10;G11B5/187;G11B5/31;(IPC1-7):G11B5/39 主分类号 G11B5/39
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