发明名称 WORK-FIXING DEVICE FOR BONDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To enable upward or downward stroke of a work retainer to be set to meet the type of a work and to be accelerated, to enable thermal deformation of the work to be flexibly dealt with and to be corrected using small number of parts and to enable an overall periphery of the work along a bonding window of the retainer to be closely contacted with a heat block. SOLUTION: An end of a leaf spring 6 is urged to the work retaining surface 4b side to the work 1 side, so as to be pressure contacted with the work 1 is projected to the work 1 side from the surface 4b of the work retainer 4 before the work 1 is retained, and drawn to the retainer 4 side, due to an elastic deformation of the spring 6, when the work 1 is retained. The work 1 is retained to the block 3 by the surface 4b of the retainer 4. At a work-conveying time, the retainer 4 is isolated at a predetermined distance from the work 1, so that the spring 6 is reset elastically with the result that the work 1 is not brought into contact with the retainer 4.
申请公布号 JP2002237502(A) 申请公布日期 2002.08.23
申请号 JP20010032646 申请日期 2001.02.08
申请人 SHINKAWA LTD 发明人 MITSUI TATSUNARI;SHIOZAWA SHIGERU;TERAKADO YOSHIMITSU
分类号 H01L21/60;H01L21/687;(IPC1-7):H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址